EE 169 - Microelectromechanical Systems Fabrication and Design

Description
Hands-on design, fabrication, and testing of micro electro-mechanical systems (MEMS). Processes including photolithography, etching, and metal deposition applied to MEMS. Design problems for MEMS transducer components. Introduction to MEMS simulation. Prerequisite: MATE 25 or MATE 153 or MATE/EE 129. Misc/Lab: Lab 3 hours.
Credits
1
Attributes
Not a Service Learning Course
Recent Professors
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Recent Semesters
Fall 2019, Fall 2018, Fall 2017
Offered
Th
Avg. Class Size
16
Avg. Sections
1