Theory, analysis, and design of micro-electro-mechanical systems. Topics include fabrication process of micro and nanodevices; electrical, mechanical, magnetic and thermal properties of micro and nanostructures; and analysis of newly developed nanostructures. PRQ: ELE 335 and ELE 330, or consent of department. Add Consent: Department Consent Required. Enrollment Requirements: ELE PRQ: ELE 335 and ELE 330,.