ELE 438 - Thin Film Engineering

Description
Lecture/laboratory course designed to demonstrate theory and principles of thin film processing including vacuum processing and deposition techniques. Topics include resistive evaporation, DC sputtering, RF sputtering, ion beam sputtering, electron beam evaporation, methods of achieving vacuum, and measurement techniques. PRQ: ELE 335 or consent of department. Enrollment Requirements: PRQ: ELE 335.
Credits
3
Recent Professors
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Recent Semesters
Spring 2020, Spring 2018
Offered
M, Tu
Avg. Class Size
47
Avg. Sections
1